Facilities
Research Facilities
Most of our research activities are conducted in our various research laboratories inside Malott Hall. TheFabrication Laboratory, Characterization Laboratory and the shared KU Nanofabrication Facility, which houses a Scanning Electron Microscope (SEM) and a Deep UV Mask Aligner for photolithography, are all located at the basement of Malott Hall while another lab, the Materials Processing Laboratory, is located at the 4th floor.
Current Research Facilities
- Ion Beam Assisted e-beam Deposition System
- Multi-target DC/RF Magnetron Sputtering System
- Pulsed Laser Deposition (PLD) System
- Thermal Evaporator System
- Reactive Ion Etching (RIE) System
- Mask Aligner with UV Exposure for Photolithography
- One-zone and Three-zone Furnaces for Materials Processing
- SQUID Magnetometer