Department of Physics and Astronomy

Pulsed Laser Deposition (PLD) System

Wed, 07/17/2013 - 11:41 -- Melisa Xin

The Pulsed Laser Deposition system is equipped with a Lambda Physik excimer laser with variable power output (up to 50 Watts), which is used to ablate the desired deposition material. The deposition chamber has a computer controlled, rotating target holder accommodating rapid multilayer film growth. The system also features a Kauffman type ion gun, making ion assisted depositions possible.

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Preparation and Fabrication

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